deep trench isolation
由MForsberg著作·2004·被引用6次—Deeptrenches,usuallywithadepthlargerthanacoupleofmicrometers,aremainlyusedtoisolatedifferentdevicesanddevicegroups(wells)inCMOS/.BiCMOS ...,Theexperimentshowsthatdeeptrenchtechnologyiscapabletopromotetheperformanceo...
Shallow trench isolation
- shallow trench isolation oxide thickness leakage
- 淺溝槽隔離
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- 屏蔽氧化層
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- 淺溝槽隔離
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- 淺溝槽絕緣sti
- deep trench isolation
- sti etch back
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- 屏蔽氧化層
Shallowtrenchisolation(STI),alsoknownasboxisolationtechnique,isanintegratedcircuitfeaturewhichpreventselectriccurrentleakagebetween ...
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